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Home / Products / Vacuum Pumps / Dry Pumps


Dry vacuum pumps for clean, oil-sensitive applications

Diaphragm Vacuum Pumps

Thanks to its compact design, the Pfeiffer Vacuum diaphragm pump is ideal for integration in increasingly small analytical systems and turbomolecular stations. Starting with a pumping speed of 0.25 m³ / h, you can choose from a wide selection of pumps. The strongest of these vacuum pumps manages a pumping speed of max. 4.3 m³ / h. The benefits of the Pfeiffer Vacuum diaphragm pump are numerous, the efficiency and reliability are unique.

Conventional Applications of Diaphragm Pumps

  • Virtually in all areas where dry, oil-free vacuum and uncontaminated gas pumping is required
  • Laboratories
  • Research and Development
  • Analytical area
  • Ideal as a support pump for a turbomolecular pump
  • Pumping systems and stations
  • Chemical industry
  • Leak detection

Scroll Pumps

The HiScroll series consists of three dry pumps of the Scroll type with a nominal pumping speed of 6 – 20m³ / h. The pumps are especially characterized by their high pumping performance against atmospheric pressure due to their unique characteristics. Its powerful IPM (Permanent Internal Magnet) synchronous motors achieve an efficiency up to 15% higher than that of conventional inverters.

Conventional Applications of Scroll Pumps

  • Mass spectrometry
  • Accelerators
  • Laboratories
  • Leak detection
  • Semiconductor technology
  • Coating
  • Gas recovery
  • Vacuum drying

Multi-stage Roots Pumps

Based on the proven technology of Roots Multi-stage dry pumps, Pfeiffer Vacuum offers a wide selection of pumps with a pumping capacity from 15 m³ / h up to 600 m³ / h. The most important characteristics for pumps in these applications are high speed and robustness of pumping, as well as high reliability.

The ACP series Roots Multi-stage pumps are designed for oil and particle free applications, in the ambient pressure range up to 3 · 10-2 mbar. Air-cooled pumps are the ideal substitute for rotary vane pumps when used in waste gas analysis systems, electron microscopes or ultra high vacuum systems. They are ideal as a pre-vacuum pump for turbomolecular pumps.

Conventional Applications of Multi-stage Roots Pumps

  • Load-Lock Cameras
  • Transfer chambers
  • Sputtering Systems
  • Deposition of Thin Films
  • Metrology

Screw Pumps

The line of dry screw pumps is ideal for low and medium vacuum applications. Not only can it be used for industrial applications, but also for coating. HeptaDry is the ideal solution for all areas that require oil-free vacuum. Pumping speeds in this series range from 100 to 2,500 m³ / h.

One-piece, variable pitch rotors are a special advantage. In the HeptaDry line, they provide the necessary internal compression to avoid unnecessary energy expenditure. The innovative design and the low speed of the pumps result in low tension of the bearings and seals.

Our HeptaDry series screw pumps are ideal for use as single pumps or in combination with our Roots HiLobe pumps.

Conventional Applications of Screw Pumps

  • Metallurgy
  • Coating
  • Lyophilization
  • Load locks
  • Electron beam welding
  • Gas separation
  • Super clean gas applications
  • Degassing

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